The effect of In xGa 1-xN back-barriers on the dislocation densities in Al 0.31Ga 0.69N/AlN/GaN/In xGa 1-xN/GaN heterostructures (0.05 ≤ x ≤ 0.14)

摘要

Al 0.31Ga 0.69N/AlN/GaN/In xGa 1-xN/GaN heterostructures grown with the metal-organic chemical vapor deposition (MOCVD) technique with different In xGa 1-xN back-barriers with In mole fractions of 0.05 ≤ x ≤ 0.14 were investigated by using XRD measurements. Screw, edge, and total dislocations, In mole fraction of back-barriers, Al mole fraction, and the thicknesses of front-barriers and lattice parameters were calculated. Mixed state dislocations with both edge and screw type dislocations were observed. The effects of the In mole fraction difference in the back-barrier and the effect of the thickness of front-barrier on crystal quality are discussed. With the increasing In mole fraction, an increasing dislocation trend is observed that may be due to the growth temperature difference between ultrathin In xGa 1-xN back-barrier and the surrounding layers. © 2012 Elsevier B.V. All rights reserved.